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6DoF inertial sensor

For Advanced Driver Assistance Systems (ADAS) and autonomous driving applications, the Panasonic 6DoF inertal sensor provides accurate and reliable acceleration and angular rate data.
sensors 6-in-1 shadow

This sensor contributes to advanced system such as ADAS (Advanced Driver Assistance Systems), autonomous driving, and more, in order to detect 6DoF data which are composed by 3 axis (forward and backward, left and right, up and down) of acceleration(Acc) and gyro data.


Item Specification
Size (mm) 4.5x4.5x1.1
Operating temperature (°C) -40°C ~ +125
Storage temperature (°C) -40°C ~ +125
Supply voltage (V) 3.3 ± 0.3, 5
Current consumption (mA) ≦ 10
Interface SPI
Gyro Axis X, Y, Z
Total offset error (dps) ≦ ± 2.0
Total sensitivity error (%) ≦ ± 3.0
Full scale range (dps) ±300, ±150, ± 120, ±60, ±30 (Selectable)
Frequency response (Hz) 10, 12.5, 27, 30, 60 Hz
Cross axis sensitivity (%) ≦ ± 1.7
Output noise ≦ 0.1dps rms (@60 Hz LPF)
Orthgonality (°) ≦ 0.01
Acc Axis X, Y, Z
Total offset error (mg)

≦ ± 50 (X, Y) ≦ ± 84 (Z)

Total sensitivity error (%) ≦ ± 3.0
Full scale range (g) ±16, ±8, ±2, ±1 G (Selectable)
Frequency response (Hz) 10, 46, 60, 250, 300, 400 (Selectable)
Cross axis sensitivity (%) ≦ ± 1.7
Output noise

≦ 4 mg rms (@60Hz LPF)

Orthgonality (°) ≦ 0.01

Automotive use cases

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Industrial and other use cases

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Agricultural, construction & bike

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Auto Lawnmowers

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Two-wheeled vehicles

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Auto-operation Railway System

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Functional safety compliance for automotive safety system (ISO26262)

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Compatible with ASIL-D functional safety development: This sensor complies with ISO26262 according to the user system safety level (ASIL: Automotive Safety Integrity Level), supports the construction of argument by providing necessary documents, and guarantees the quality for automotive applications.

Highly accurate 6DoF MEMS sensors on single die, improving system design flexibility

Sensors 6-in-1 sensor chip-configuration

Orthogonality: ≦0.5° between Gyro and Acc axis

The misalignment between Acc and Gyro axis deteriorates data accuracy because Acc and Gyro sensors are comprised of the multiple chips in the conventional inertial sensor.

6in1 inertial sensor adapts one single chip solution in which all 6 axis of Acc and Gyro sit together.

And all 6 axis are orthogonal and enables high accuracy data in spite of the installation posture.

Compact and simple ECU system design

Sensors 6-in-1 cross-sectional-view

6DoF one package: 4.5 x 4.5 x 1.1 mm

This sensor adapts electrostatic MEMS and encapsulates MEMS and ASIC by wafer level packaging to realize the world compact and low profile 6DoF inertial sensor.

This enables automotive ECU System to be simple and smaller.

  1. Au Wire
  2. Leadframe

Dimple processing contributes to improved mounting quality

Dimple processing enables soldering fillet visible at the side of lead terminals.

This can confirm each terminal soldering correctly to the substrate land by the fillet visible inspection.

Reliability test condition (AEC-Q100 compliance)

Item Specification
Temperature humidity bias (THB) 85°C / 85% RH / 3.6V / 1000h
High temperature storage life (HTSL) 150°C / 1000h
High temperature operating life (HTOL) 125°C / 3.6V / 1000h
Temperature cycling (TC) -55°C ~ 150°C / 1000 cycles
Mechanical shock (MS) 1500 G / 0.5ms / 5 times for each axis
Variable frequency vibration (VFV) 50 G / 20Hz ~ 2kHz / 4 times for each axis


Name File type Size Date Language
PDF Products Catalog (6in1 Sensors) Catalog 477KB 23.04.2021 English
PDF EWTS5G Datasheet Data sheet 2MB 15.06.2022 English
PDF 6 DoF Inertial Sensor Flyer 2MB 02.06.2023 English

CAD data

Name File type Size Date Language
ZIP CAD Data CAD 9KB 24.02.2022 English


Name File type Size Date Language
PDF Letter for Certificate of Compliance to EU RoHS Directive (EWTS5G) Environmental, RoHS 103bytes 12.07.2024 English
PDF Report of Confirmation of EU REACH (EWTS5G) Environmental, REACh 104bytes 12.07.2024 English


Name File type Size Date Language
PDF Production location Data sheet, Packaging information 168KB 14.05.2024 English