Sensors for factory automation hero

Particular use sensors

Sensors for special applications in the wafer production, fluid and leakage detection in the semiconductor industry.

Our top product lines

BE-AH optical bubble sensor
Sensors

BE-AH optical bubble sensor

Sensor for air bubble detection with external amplifier for easy configuration.
BE-A optical bubble sensor
Sensors

BE-A optical bubble sensor

Sensor for air bubble detection.
BE-R  particular use sensor
Sensors

BE-R particular use sensor

Liquid level detection.
M-DW1 particular use sensor
Sensors

M-DW1 particular use sensor

Wafer mapping sensor.
EZ-10 particular use sensor
Sensors

EZ-10 particular use sensor

Water detection sensor.
HD-T1 particular use sensor
Sensors

HD-T1 particular use sensor

LED type wafer alignment sensor.