Exposing: essential precision in pattern transfer

Project accurate circuit patterns with consistent reliability

In the exposing step, UV light projects circuit patterns onto a photoresist-coated wafer. That takes accuracy, as even the tiniest shift or blur has impact. Stay ahead of those risks and create precise patterns and alignment to make sure every device works as intended.

Equip high-precision lithography systems

 

Exposing calls for exact wafer positioning, stable stages and accurate reticle alignment. Therefore, our sensors handle wafer detection, stage monitoring and alignment feedback. And to stop particles from settling? With our ionizers you remove static charge where it matters most.

Supporting next-generation lithography requirements

As chips get smaller, tolerances tighten and contamination becomes more of a risk. Advanced masks and exposure tools need nanometer-level stability. That means precise motion, clean conditions and reliable monitoring. Our components help you keep control. Ranging from accurate alignment to effective charge management, now and for the future.

Our technology for exposing 

HG-T laser thru-beam sensor for measurements
Sensors

HG-T laser thru-beam sensor for measurements

Highly precise and stable measurements.
SQ4 leak sensor
Sensors

SQ4 leak sensor

Safety liquid leak sensor, type 4.
ER-X ionizer
Ionizer

ER-X ionizer

Ionizer for wide area application with or without compressed air.
Micro Photoelectric Sensor
SENSORS

Micro Photoelectric Sensor

One step ahead in performance and mounting ease
Digital Displacement Sensor
SENSORS

Digital Displacement Sensor

High-speed sampling and high resolution. The new choice for even more varied data collection and processing.
Threaded Type Fiber
FIBER SENSORS

Threaded Type Fiber

Digital Laser Sensor LS-400 
SENSORS

Digital Laser Sensor LS-400 

Narrow Beam Fiber
FIBER SENSORS

Narrow Beam Fiber

It is not easily affected by surrounding obstacles even in long distances.
Convergent Reflective Type Fiber
FIBER SENSORS

Convergent Reflective Type Fiber

It is a fiber in which the sensing distance is limited to a specific range
Supporting your semiconductor operations

Supporting your semiconductor operations

With Panasonic Industry’s global support network, including our expert team based in Best, the Netherlands, you can rely on us for fast, responsive service. Our extensive experience in the semicon industry, combined with the backing of our international parent company, ensures that we’re always here to help you succeed.
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