Fiber optic connections in vacuum

Our high reliability flange system for semiconductor manufacturing

Maintaining a fully sealed vacuum chamber is critical in semiconductor manufacturing. Even the smallest leak can disrupt chamber stability and negatively affect key process steps. To support these demanding conditions, Panasonic Industry has engineered a vacuum‑resistant fiber‑optic flange system designed for extreme environments and high‑temperature semiconductor applications. This solution combines process stability, clean integration, and fast installation.

A vacuum flange designed for semiconductor precision

The Panasonic vacuum flange creates a reliable seal between the atmospheric side and the vacuum chamber. This prevents:

  • Pressure fluctuations during sensitive vacuum steps
  • Unwanted contamination entering the chamber
  • Particle generation caused by over‑tightened mechanical fittings

This solution pairs with Panasonic’s vacuum‑resistant optical fibers, designed for operation under high temperatures up to 300°C, enabling reliable sensing in challenging SEMI process environments.

Fast, tool free fiber installation

One standout feature is the one‑touch, one‑second installation mechanism, originally used in Panasonic’s vacuum‑resistant fiber systems. It allows engineers and operators, even when wearing gloves, to mount and secure fibers with ease. Simply place the flange, insert the fiber head, and the system locks into position.

Compatible fiber types include:

  • Thru‑beam fibers (e.g., FT‑40V)
  • Long‑range reflective fibers (e.g., FD‑KZ50V)
  • High‑accuracy reflective sensing options

These fibers support wafer centering, wafer presence, and detection, even for transparent wafer materials, and maintain consistent performance in vacuum chambers and high‑temperature environments. 

Key advantages for equipment builders and process engineers

  • Ultra‑fast installation: connect a fiber in one second, no tools needed
  • Efficient system design: one feedthrough supports multiple fibers
  • High‑temperature operation: reliable up to 300°C
  • Compact and clean: ideal for modern vacuum platforms
  • Stable detection performance: advanced fiber sensor technology ensures both short‑ and long‑term stability under vacuum conditions

How to: 

One-touch installation of vacuum-resistant flange and fiber head
Optimized for today’s semiconductor equipment

Optimized for today’s semiconductor equipment

In environments where space, cleanliness, and process uptime are critical, Panasonic Industry’s vacuum resistant flange and fiber system delivers an elegant, high performance sensing solution. It supports robust wafer handling, precise alignment, and contamination free detection across multiple semiconductor process modules.  For more information or application support:
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