Cleaning: the foundation for flawless semiconductors

Prevent any contamination with us – however minimal

Microscopically small contaminants disrupt the precision of semiconductors. Therefore, leave nothing to chance, no matter how high the bar. In your systems, everything revolves around the details. Realized by components such as our ionizers and sensors.

For single wafer and batch cleaning

 

Stay ahead of any contamination, whether it concerns single wafer cleaners or batch cleaners. While our sensors ensure accurate wafer detection and monitoring, our ionizers neutralize any static charge in a timely manner. Dust particles don't stand a chance, anywhere.

Solutions for every cleaning system

Cleaning in the front-end process is as versatile as it is challenging. Just think of the ultra-fine particles, which are fatal for nanostructures. Metal residues can disrupt the circuit, organic contaminants prevent new layers from adhering properly. And what about unwanted oxide layers? Take no chances with us, as we are there for the complete front-end process.
 

Our technology for cleaning processes

EX-L200 laser sensor
Sensors

EX-L200 laser sensor

The world’s smallest laser sensor with a built-in amplifier.
SF4D safety light curtain
Sensors

SF4D safety light curtain

New light curtain concept: both compact and robust.
Fibers
Sensors

Fibers

Optical fibers of various types. Needs to be combined with a fiber amplifier.
SQ4 leak sensor
Sensors

SQ4 leak sensor

Safety liquid leak sensor, type 4.
Heat-resistant fiber
FIBER SENSORS

Heat-resistant fiber

It can be used under environments of -60 to +350 ℃ -76 to +662 ℉.
DP-100 pressure sensor
Sensors

DP-100 pressure sensor

High resolution pressure sensor with dual 3-colour display.
Vacuum-resistant Fiber
FIBER SENSORS

Vacuum-resistant Fiber

Usable in high-temperatures of 300 ℃ 572 ℉ vacuum
SG safety switches
Sensors

SG safety switches

SG safety devices.
One-Touch Connection System Vacuum-resistant Fibers
FIBER SENSORS

One-Touch Connection System Vacuum-resistant Fibers

Breakthrough in vacuum-resistant fibers One-Touch Connection Just in 1 Second* * Time required to connect one fiber to the flange.
Supporting your semiconductor operations

Supporting your semiconductor operations

With Panasonic Industry’s global support network, including our expert team based in Best, the Netherlands, you can rely on us for fast, responsive service. Our extensive experience in the semicon industry, combined with the backing of our international parent company, ensures that we’re always here to help you succeed.
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